Onto Innovation Investor Presentation

Organic Growth Resulting from Share Gains & Potential to Enter New Addressable Markets Annual Revenue $1B Model $1.2B Model $1.4B Model Gross Margin Operating Profit 56% - 57% 57% -58% 58% -59% 31% -32% - 33% 34% 35% - 36% Earnings per Share $5.20 - $5.35 $6.08 - $7.00 $8.10 $8.35 New Long-term Operating Model* Reduce Comprehensive Carbon Footprint 30% by 2025 16 Reduce Freshwater Usage 30% by 2025 Increase Renewable Energy Usage 30% by 2025 Reduce Landfill Hazardous Waste 30% by 2025 *Non-GAAP Long Term Financial Model: excludes amortization and merger costs; includes stock-based compensation innovationTM onto

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