KLA Investor Conference Presentation Deck
SiC at KLA
Proven Solutions
soitec
Soitec boosts customer yield of
Silicon Carbide semiconductor
manufacturing with KLA inspection
technology
Soitec boosts customer yield of Silicon Carbide semiconductor
manufacturing with KLA inspection technology
Bernin (Grenoble), France, July 13th, 2022 Soitec (Euronext Paris), an
industry leader in designing and manufacturing innovative semiconductor
materials, has selected KLA Corporation (NASDAQ: KLAC), a leader in process
control and advanced inspection systems, to enable high yield
manufacturing of innovative Silicon Carbide (SIC) devices for the automotive
industry.
Soitec leverages its unique and patented SmartSiCTM technology to produce
SiC substrates, which aim to improve the performance of power electronics
devices and boost electric vehicles' energy efficiency.
Based on its track record of using KLA's inspectors for its Silicon-on-Insulator
(SOI) wafers, Soitec has extended its partnership with KLA and selected the
Surfscan" SP AZ unpatterned inspection system for its SmartSICTM wafers.
Soitec's SmartSicTM wafers provide superior and unique crystal quality, while
KLA's Surfscan SP A2 leverages DUV optics and advanced algorithms to
support substrate quality control. This partnership will enable SIC substrate
production at new and even more sophisticated levels, supporting the
industry to bring high quality SiC semiconductors in high volumes to the
automotive market.
17 KLA Non-Confidential | Unrestricted
Highlights from KLA's SiC Portfolio
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inspection solutions for substrate/epitaxy, patterned wafer and inline
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metrology solutions for wafer shape, films, overlay, CD, implant and analytics
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