Onto Innovation Investor Presentation

3 Onto Innovation Snapshot High tech capital equipment company specializing in optical process solutions for semiconductor and related markets Top WFE Strategic Supplier Tier1 Annual Revenue Growth ('21-'22) $789M to $989M³ NOVEMBER 2019: RTEC-NANO MERGER Q1 2020 Gross Margin² Q1 2021 Gross Margin² 52% 54% $ $241 Million Q1'22 REVENUE 9,000 Systems ACTIVE METROLOGY & INSPECTION TOOLS INSTALLED Q1 2020 Operating Margin² 16% Q1 2021 Operating Margin² 31% 75 Fabs FAB-WIDE YIELD/DEFECT SOFTWARE INSTALLED Note 1: 90% of WFE awarded to companies in this tier Note 2: Q1-2020 (ONTO's first full quarter) and Q1-2022 non-GAAP results Note 3: Analyst consensus estimate for FY 2022 Q1 2020 FCF2 6% Q1 2021 FCF2 18%

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