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SPE Division: New Equipment Sales by Application (Billion Yen) 2,000 DRAM ■Non-volatile memory 1,692.7 Logic foundry 1,499.0 14% 1,500 Logic & others Logic foundry + 26% 20% Logic & others ■ In logic/foundry, sales increased significantly on the back of solid investment 1,000 963.1 21% 24% ■ Due to inventory adjustments by customers, sales composition for memory decreased 26% 66% 500 53% 24% 26% 0 FY'21 CORP IR / May 11, 2023 FY'22 FY'23 Percentages on the graph show the composition ratio of new equipment sales. Field Solutions sales are not included. TEL 6

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