KLA Investor Conference Presentation Deck

Data Automation and Process Control will Enter Packaging Fabs Process Control KLA 2135 Coat Expose Etch Inspect and Measure 25 KLA Non-Confidential | Unrestricted Clean KIR Fill KLA CMP Introduced in frontend in mid 90's From Defect... Analyze Browser Cluster Analysis DSA SSA Zonal Analysis Repeater Analysis SPC Review Sampling ∞ W Correlate Monitor Water Lookup DBR 126 DBB RSDSA 88888 WIP Commonality Analysis FOO Metrology KPC++ Unpatterned to Patterned Correlation Hotspot Discovery Reticle Inspection Lot History Metrology to Defect Yield Prediction Unique Opportunity for KLA to Implement Semiconductor Frontend BKMs Identify Killer Defect? Problematic Chamber/ Process? *********** KLA+

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