Investor Presentaiton
Semiconductor Solutions with Laser Annealing
Market Drivers
■ Artificial Intelligence
High Performance Computing
Graphical Processing Units
LSA101
Veeco
The Veeco Difference
Veeco's Laser Annealing systems
allow customers to perform their
annealing steps with great accuracy
■ Very high temperatures over
precise geometries
■ Extremely short durations
■ Minimal wafer defects
Current status:
■ PTOR at ≤7nm with 2 customers
Won third application with existing
customer
■ Making progress with:
о Next nodes at existing customers
о
An additional logic customer
o Early-stage engagement with
memory customer
10 Investor Presentation | 2021 Veeco Instruments Inc.
>90nm
90-40nm
40-14nm
<10nm
Semiconductor Node
Enabling Advanced Nodes
Furnace
Anneal
Rapid
Thermal
Processing
Laser
Annealing
Melt
Veeco
Anneal Time
Hours Minutes Seconds Milliseconds Microseconds
Nanoseconds
PTOR Process Tool of Record
VeecoView entire presentation