Investor Presentaiton

Extended Leadership in the Semiconductor Market Beam Profiler Thermopile Optical Sensor ••mks QUASI-CW Laser Water Positioning Stage LITHOGRAPHY & INSPECTION FRONT END Fab Network (APC) Mass Flow Verifier Beam Profiling Camera Gases In Excimer Laser Mirrors Digital Control Network Chamber Controller Connectivity Internet (e-Diagnostics) fr fr fr fp Gas Box Pressure Transducers Service, Training, and Calibration Mass Flow Controllers Flow Ratio Controller Remote Plasma Source Gas Composition Monitor Process Chamber Ozone Generator Materials Delivery System Gate Valve Endpoint Detection UW Power Generator RF Power Generator Helium Cooling Subsystem RF Matchi DC Power Generator DEPOSITION, ETCH & CLEAN MKS PROPRIETARY Process Monitor Indirect Gauge Linear Stages Direct Gauge Pressure Controller 0 0 UV Laser о BACK END Control Valve Indirect Gauge Isolation Valve To Pump Rotation Stages Vacuum Components/ Subsystems Exhaust Monitor Heater Air-Bearing Stage PACKAGING & INSPECTION Precision Optics I Vibration Isolation Table 1 11

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