Onto Innovation Investor Presentation

10 GROSS MARGIN % New JetStep X500 Adds Process Tool to Onto Portfolio Tool Margin with Connected Solution and Support Contracts Result: Above Corporate Average GM% TOOL & PANEL SOLUTION GROSS MARGIN IMPROVEMENTS Support¹ CORPORATE AVERAGE GM% IN LTOM LITHOGRAPHY GM% TARGET IN LTOM Engineering Builds First Beta- Site Tools Manufacturing Efficiencies Supply Chain Cost Improvements System Cost Improvements Next 3-8 System Shipments 10+ System Shipments Firefly Inspection + Software onto JetStep X500 JETSTEP X500 REVENUE Above Corporate GM% + Firefly Inspection Revenue + Software Revenue + Support Contract Revenue¹ Note 1: Support Contract begins after JetStep warranty period ends innovationTM onto

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