Investor Presentaiton

CSBG delivering innovative solutions Expansion of our Equipment Intelligence® offerings First big data application of high-resolution optical emission spectroscopy Complexity in collecting and interpreting plasma spectra across large tool fleet Allows customers to resolve performance issues Collaborative maintenance robot (Co-bot) Industry's first collaborative maintenance robot Deployed into a production fab at a leading customer Helps execute complex maintenance tasks with precision and repeatability • Important capability as semiconductor manufacturing expands and becomes more regionalized CSBG customer support business group LAM RESEARCH

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