Onto Innovation Investor Presentation

Onto Growth Driver: High Performance Logic Devices GROWING DEMAND INCREASE IN PROCESS CONTROL Advanced Logic Wafer Starts Optical Metrology Sampling Rates FinFET 2X 2021-2025 30- 50% 10% CAGR GAA ~50% Source: ASML Investor Day, Estimated Advanced Logic Wafer Starts, September 2021 8 N-1 FinFET N ONTO QUALIFIED OR COLLABORATING AT ALL GAA CUSTOMERS Measuring additional features requires more unique signals ONTO PATENTED SE TECHNOLOGY N+1 GAA Source: ONTO Company Estimates OTHER SE TECHNOLOGY LIMIT No. of unique signals FinFET GAA NO. OF PARAMETERS TO MEASURE innovationTM onto

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