Q2/2023 Investor Presentation

Consolidated Statement of Cash Flows (EUR million) Net result Adjust for: Non-cash items H1/2023 H1/2022 Q2/2023 43.9 31.1 40.4 AIXTRON Q2/2022 17.4 5.3 4.3 2.1 1.6 Changes in Working Capital (119.7) 1.0 (118.8) (9.8) Cash flow from operating activities (70.5) 36.4 (76.3) 9.2 Capital expenditures/disposals (9.6) (8.9) (5.7) (4.1) Free cash flow (80.1) 27.5 (82.0) 5.1 FX effects/other (1.3) 1.1 (0.7) 0.6 Cash & cash deposits & investments 210.4 346.2 210.4 346.2 1 Rounded figures; may not add up 2 Presentation of 2022 cash flow changed to include effects from valuation of investment funds in cash flow from operating activities 5

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