Investor Presentaiton

о о High Growth Semiconductor Opportunity ° 0 0 0 о о ATOMIC LAYER PROCESSING New process technologies create opportunities to expand SAM and gain share • Ozone • Pressure, Flow, Valves • Power Solutions HIGH ASPECT RATIO In logic and memory, device architectures require more power and control to process tomorrow's most critical features High power, high finesse RF • On-wafer remote plasma processing KEY ENABLING TECHNOLOGIES Across our diverse portfolio, we have several key technologies that enable our customers Power/Match • • Remote Plasma Processing • Reactive Gas • Vacuum Measurement ••mks MKS PROPRIETARY 12

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