Investor Presentation - 13th Annual CEO Summit
Key Technology Transitions Driving Growth in Ichor SAM
WFE Intensity Increasing(1)
Etch and Deposition Intensity Increasing(2)
EUV Ramping(3)
WFE as % of Semi. Rev.
2.50
14%
3D NAND SAM
DRAM SAM
Foundry/Logic SAM $10
EUV Est. Sales ($B)
2.00
13%
$8
1.50
12%
$6
11%
10%
35% Increase
9%
2015 2016 2017 2018 2019
2020
NAND
Foundry and
Logic
1.00
0.50
100% Increase
45% Increase
100% Increase
$4
-50% CAGR
$2
$-
2017 2018 2019 2020 2021 2022E
14/16nm
5nm
Ix node
IB node
256L
64L
64L
96L
128L
192L
256L
14/16nm
10nm
7nm
5nm
3nm
FinFET
Gate-All-Around
(1) UBS Research & Gartner Ests.
(2) Lam Research Analyst Day Presentation (March 2020), normalized to 1.0 at starting node.
(3) 2017 estimated EUV revenues: KeyBanc Research; 2018-2022E EUV market size: Evercore Research as of April 2021.
ichor
Proprietary
■ Geometries becoming far more complex
☐
◉
Impact of defects magnified
Requiring faster etch rates, more control,
higher development and production costs
■ Increased etch and deposition intensity at
each node transition
■ More fluid delivery content per system
■ Increasing opportunity for EUV on key
layers offers incremental gas delivery SAM
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