Onto Innovation Investor Presentation

12 Onto Growth Driver: Memory DRAM Evolution Roadmap UNIQUE HYBRID METROLOGY SUITE HYBRID METROLOGY COMPLEX GEOMETRIES MEASURED WITH HIGHER ACCURACY HORIZONTAL TRANSISTOR IMPULSE Device VERTICAL TRANSISTOR 3D STACKING test Integrated Metrology TRANSISTORS NAND Evolution Roadmap ZH SINGLE 3D STACK DUAL 3D STACK 3 STACKS >500 PAIRS Lab PREDICTIVE YIELD Atlas Metrology TEM Al-Diffract Software Iris Planar Films Metrology Aspect Metrology SEM Element FTIR Metrology FLEET PRODUCTIVITY Process Residual films accuracy >5X Baseline Orbit Hybrid Metrology ENABLING ACTIONABLE DATA WITH FASTER TIME-TO-RESULTS >2X Industry benchmark Proprietary Onto Orbit Solution innovationTM onto

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