KLA Investor Conference Presentation Deck

Semiconductor Technology has been Scaling for 50+ years 1980 g-line (436nm) 1μm 500nm 1990 i-line (365nm) 15 KLA Non-Confidential | Unrestricted KrF (248nm) 250nm 2000 ArF (193nm) 130nm 65nm 2010 ArF Immersion (193i) 32nm ■ 16nm 10nm Conventional Transistor Scaling is still happening, but becoming expensive 2020 7nm EUV (13.5 nm) 5nm 3nm ‒‒‒‒‒‒ ‒‒‒‒‒‒ tA $ ******* KLA+

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