KLA Investor Conference Presentation Deck

I-PAT® Inline Defect Screening: Leveraging Al to Reduce Risks ALL 14 KLA Non-Confidential | Unrestricted Layer 4 Layer 3 Layer 2 Layer 1 Deep Learning High Priority Defects Mid Priority Defects Low Priority Defects db Aggregated & weighted defectivity Outlier statistical filtering Each die is scored based on aggregate defectivity Merge with electrical test data KLA+

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