KLA Investor Day Presentation Deck

Optical Inspection Delivers Unique Value JⓇU!! 爸呵呵呵! © Sensitivity ▪ Gen4/Gen5 provides the widest wavelength range to find all defect types and sizes Coverage Note: Defect image sources are SEMICON West 2021, SPIE 104510L, SPIE 1080909 and SPIE 115170U. ▪ 2 TE H 7. 4 I 4 · ▪ Yield enhancement requires wafer level signature analysis ▪ Full wafer inspection is critically important as defects can occur anywhere Broadband platform finds critical defects with full wafer coverage enabling customer success in R&D and HVM KLAH Investor Day 41

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