KLA Investor Day Presentation Deck
R&D Investment to Optimize Reticle Inspection Product Portfolio
Percent R&D Investment by System Type
100%
75%
50%
25%
0%
R&D Investment for Current and Next Generation Reticle Products
CY16
CY17
¹C00: Cost of Ownership
CY18
1% Optical
CY19
1% Next Gen
CY20
Reticle R&D Investment
CY21
CY22E
Reticle R&D Investment ($)
I
■
Optical technology continues
to be the workhorse for all
advanced reticle inspection
applications
Majority of advanced reticles
can be inspected using Semi PC
optical inspection technology
R&D spending focused on next
generation technologies
Extensive roadmap for optical,
e-beam and actinic EUV
inspectors
Semi PC reticle inspection strategy utilizes multiple technologies to deliver the best CoO¹ solution for customers
KLAH Investor Day 50View entire presentation