KLA Investor Day Presentation Deck
Case Study: ICOS Component (Final Package) Inspection
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Multi-die components have
higher quality requirements
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Problem
Complexity and cost driving 100% inspection of
final multi-die components
Large form factor, complex architecture and
shrinking geometry require advanced inspection
and metrology
Solution
Developed new inspection platform for large form
factor components at very fast throughput
Designed new optics to optimize focus on every
surface to improve defect detection
Created new top 3D metrology capability to
accurately measure height of each die
KLA
THE
ICOS™M T390
component inspection
ŞM
CY16
Results
Increased defect sensitivity and
accurate 3D metrology
Top 3D - Die height & capacitor height
ICOS component inspection
(2.5D/3D) revenue
CY17
CY18
CY19
CY20
Complex packages require more advanced inspection and metrology capability
CY21
CY22E
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