KLA Investor Day Presentation Deck

ŞM e-Beam Market Overview Optical Inspection vs. e-Beam¹ 3,000 2,400 1,800 1,200 600 0 3,000 2,400 > 1,800 1,200 600 เ CY18 0 Optical Optical Inspection vs. e-Beam Review³ เ เ CY18 Optical CY19 le-Beam CY20 CY21 Optical as % of Total CY19 e-Beam Review CY20 CY21 Optical as % of Total 100% 80% 60% 40% 20% 0% 100% 80% 60% 40% 20% 0% Optical Inspection vs. e-Beam Inspection² 3,000 2,400 1,800 1,200 600 0 3,000 2,400 1,800 1,200 600 CY18 Optical 0 CY18 Optical Metro il CY19 e-Beam Inspection CY19 Optical Metrology vs. e-Beam Metrology4 CY20 le-Beam Metro CY21 Optical as % of Total CY20 CY21 Optical as % of Total 100% 80% ¹e-Beam as defined by Gartner, April 2022. 2KLA analysis with e-beam metrology removed from e-beam inspection. ³Gartner, April 2022. 4e-Beam metrology as defined by KLA. 60% 40% 20% 0% 100% 80% 60% 40% 20% 0% All e-beam applications targeted towards optical assist ▪ Three e-beam segments - inspection, metrology and review - all targeted towards optical assist I e-Beam review scales with optical inspection (complementary) ■ e-Beam metrology <15% of total market - e-Beam inspection not scaling KLA customers requesting stronger coupling between optical inspection and e-beam products KLAH Investor Day 45

View entire presentation