KLA Investor Day Presentation Deck

Long History of KLA Technology Innovation <1990s First wafer inspector invented First reticle inspector invented First laser scattering wafer inspector First inline overlay metrology system First unpatterned wafer inspector Continuous innovation in subsystem technologies KLA# Leveraging KLA's portfolio of product and technology innovations Today 39xx high-res ВВР TeronTM 640e Dual-imaging Voyager 1015 DUV Platform ArcherTM 750 tunable λ IBD Surfscan® SP7XP DUV Line Scan KLA# Investor Day 79

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