KLA Investor Day Presentation Deck

Case Study: Optical Inspection + e-Beam Assist Gen5 BBP optical inspection KLA high capture of critical defects at full wafer coverage ■ 1010 1010 eDRX1™ e-beam review KLA DRX1" accurate nuisance filtering at high review speed Concept introduced at 2019 Investor Day ▪ Critical Gen5 information is shared with the e-beam system for defect of interest detection through nuisance filtering Mixed I Critical defect Critical Metal Layer defect results Standard New Technology 2x improvement in critical defect detection ■ All defects classified with nuisance reduced Semi PC unique optical to e-beam connectivity enables R&D and HVM success Nuisance Critical defect KLAH Investor Day 47

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