KLA Investor Day Presentation Deck

Case Study: Optical Overlay Metrology + e-Beam Assist Overlay Measurements through the Life of One Lot SEMREG™M E200 e-beam overlay Number of Overlay Measurements ال... Design Node Archer™ imaging-based overlay KLA Archer 750. high throughput overlay measurements KLA SEMREG E200 ultra precise overlay measurements e-Beam overlay is used as a calibration input for improved optical overlay accuracy աս Overlay Inaccuracy Optical Semi PC unique optical to e-beam connectivity enables R&D and HVM success 4.5x reduction in optical overlay inaccuracy with e-beam calibration Optical with e-beam assist KLAH Investor Day 48

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