KLA Investor Day Presentation Deck
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I
Specialty Semiconductor Process (SPTS) Overview
0
2015
REVENUE ($M)
10%
Hill
CAGR
2017
2016
~$350M+¹
2018
62 KLA Non-Confidential | Unrestricted 1 Includes Service.
2019E
"More than Moore" applications within the broad WFE
Differentiated IP portfolio for plasma-based process solutions
Highly customized solutions to meet loyal customers' requirements
First-to-Market
1979
Introduced
1st cassette-
to-cassette
plasma tool
BROAD PRODUCT OFFERING
#1 Position in Specialty Semi Markets
JV / M&A
Versalis
MVD
S
1982
Introduced
1st cassette-
to-cassette
PVD tool
Etch
PVD
KEY ACQUISITION AND JV MILESTONES
1993
Co-
developed
Bosh process
for Mems
Release Etch
1998
First-to-
market with
ultra low
CVD
dielectric
CVD
2007
Entered 3D
TSV
applications
2015
Introduced
1st PVD tool
for advanced
packaging
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