KLA Investor Day Presentation Deck
Case Study | Solving 3D Challenges with Leading Memory Customer
New device architecture;
immeasurable in production
BACKGROUND
Customer yielding issue
related to inability to
monitor effectiveness in
high-aspect ratio etching in
advanced 3D NAND and
DRAM
Close collaboration; alpha tool
built and shipped to customer
35 KLA Non-Confidential | Unrestricted
KLA SOLUTION
Win/Win: tool concept validated,
and customer gets inline monitor
Developed XRAY (SAXS) technology
Partnered with customer and provided alpha learning
tool to obtain unique data
U
OUTCOME
Intensity
Gain
Enabled yield enhancement
for customer
Improving Yields for Customers and Increasing Memory Intensity
Improved inline control
Shortened time to market
for next gen devices
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