KLA Investor Day Presentation Deck

Reticle Quality Control Market Overview Patterned reticle inspection ■ Reticle blank inspection ▪ Reticle metrology I 6 01-=-=-* ■ ■ Reticle IC re-qual ▪ Wafer print check ■ HIL Li S 15 FLS -D Patterned reticle inspection EUV post pellicle inspection I Established ■ ■ ■ ■ Pathfinding New; $200M to $600M potential Driven by three key variables with high uncertainty today: 1. Next generation pitch requirement 2. Mass pelliclization 3. High NA EUV HVM timing Well understood; $1B+ Growing Evolutionary improvements I ▪ Established segment: 25 years based on optical inspection workhorse ■ Reticle inspection market has two segments ■ Pathfinding segment: New technologies being evaluated for future tightened pitch requirements KLA participates in both segments KLA leads in established segment | Deep customer collaboration on new technologies in pathfinding segment KLAH Investor Day 51

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