KLA Investor Day Presentation Deck

2026E Target Model: Scaling Resumed at 7nm EUV and Drove Significant Investments Design Starts Have Become More Affordable >50% increase in design starts and WSPM¹ at 7nm 1 L 28nm 20nm 16nm Design Starts 10nm WSPM WSPM¹ Sources: KLA Analysis, VLSI Tech Insights May 2022, Gartner April 2022, SEMI May 2022 1 WSPM = wafer starts per month 7nm Resumption of Scaling Drove Increased Investments Logic/Foundry WFE 70 60 50 40 30 20 10 0 CAGR: -3.8% |||| CY12 CY13 CY14 CY15 CY16 CAGR: 39.5% CY17 CY18 CY19 30% - 40% of total WFE ||| CY20 CY21 CY22E 50% - 60% of total WFE KLAH Investor Day 127

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