KLA Investor Day Presentation Deck

Semi PC EUV Reticle Inspection Summary >$2.2B Cumulative KLA EUV reticle qualification revenue KLA >30 Teron™ 640e systems shipped (mask shop) Teron™ 640e >50 Teron™M SL670e systems + Gen5 Print Check systems shipped (IC fab) H™ KLA BETTER 392x cmmmc Semi PC enables EUV in HVM >85% Percent of EUV reticles inspected by KLA in HVM KLA >300 Die-to-database systems installed worldwide with >90% market share Teron™ SL670e KLAH Investor Day 55

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