KLA Investor Day Presentation Deck

Case Study: Legacy Node¹ Customer Spend With KLA Services ■ ■ ■ ■ Environment 2013 - 2018: Factory utilization 70-80%, stable manufacturing processes, and less stringent end-customer requirements Customer Approach: Harvesting parts from older tools, leveraging secondary tool market, utilizing experienced internal and/or 3rd party resources 2019-2021: Factory utilization >95%, customers demanding better performance and throughput per square foot, more stringent end- customer requirements: reliability, quality, delivery, performance KLA Response Collaborated with customers to improve fab optimization, data and analytics, and tool security Created a dedicated team to focus on legacy node customers Invested in engineering resources to solve obsolescence challenges Hired and trained resources and increased inventory investment $M 128nm and above design rules, ex-memory * Chart represents single tool set Results Legacy node customer spend with KLA Services* ||| CY13 CY14 CY15 CY16 CY17 CY18 CY19 CY20 CY21 Continued customer demand drives legacy node service revenue growth KLA# Investor Day 96

View entire presentation