KLA Investor Day Presentation Deck
KLA e-Beam Platform Innovation
Industry-Unique
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e-Beam Platform with Unique Architectural Elements
Multiple e-beam systems support inspection, review and metrology applications
High Beam Current Density
essential for high sensitivity
inspection of advanced design
node devices at high e-beam
throughput
Industry's Widest
Wide Optics Range
enables capture of critical defects
across an array of process layers
Industry-Unique
Simul-6™M
reduces the time required to
identify different defect types
with simultaneous surface,
topographic, material contrast
and deep trench information
Industry-Unique
Yellowstone™
10 billion pixels of information per
scan enables efficient
investigation of suspected
hotspots and defect discovery
within a broad area
Industry-First
T
SMARTS™
integrated Artificial Intelligence,
discriminates between extremely
subtle defect signals and
surrounding pattern and process
noise
KLAH Investor Day 46View entire presentation